Graphene processing using electron beam assisted metal deposition and masked chemical vapor deposition growth
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چکیده
منابع مشابه
Graphene processing using electron beam assisted metal deposition and masked chemical vapor deposition growth
The fabrication of graphene devices can be challenging due to exposure to harsh chemicals and mechanical wear such as ultrasonication used for cleaning in photolithography and metal deposition. Common graphene processing methods often damage fragile graphene sheets and can ruin the device during fabrication. The authors report a facile method to overcome many of these challenges, which is speci...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
سال: 2016
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.4958795